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Scanning Auger electron spectroscopy

Scanning Auger Electron Microscopy

In 2009 we installed a JAMP-9500F Field Emission Auger Microprobe in a laboratory in the cellar of the TNF-Tower.

Specifications:
Electron Optical System
Minimum probe diameter: 3 nm (25 kV, 10 pA)
Probe diameter in Auger Analysis: 8 nm (25 kV, 1 nA)
Accelerating voltage: 0.5 to 30 kV
Probe current: 1x10-11 to 2x10-7 A
Magnification: x25 to x500 000
Working distance: 24 mm

Auger Electron Spectroscopy System
Energy Resolution (ΔE/E): 0.05 to 0.6%
Sensitivity: 120 000 cps/ch or more
                               840 000 cps (using 7 channel detector kit)
Energy scan range: 0 to 2500 eV
Vacuum System
Pressure in the specimen chamber: 5x10-8 Pa or less

Additional Features:
Argon ion gun
Specimen cooling and fracturing device
Back scatter electron detector
Heating stage

Auger-Elektronen-Spektroskopie (SAES)

The picture shows the system during the installation process.

Example Auger mapping on a thin steel lamella prepared with FIB. A platinum coating layer is on top of the lamella.

Kontakt:
Assoc. Prof. DI Dr. David Stifter
Head of laboratory CDL-MS-MACH / Deputy Head of the Institute

office T-952
Tel.: 8881
david.stifter(/\t)jku.at