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Laser induced Chemical Processes

The fundamentals and applications of laser-matter interactions are studied with particular regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid and solid-solid interfaces. At present, the main interests are the modification and ablation of material surfaces, laser-induced chemical vapour deposition (LCVD) and etching, and the formation of coherent and non-coherent structures.

Etching of Si in Cl2


Growth and thermal stability of GaPO4 epitaxial thin films
J.D. Pedarnig, S. Roither, M. Peruzzi, D. Bäuerle: 2006

Femtosecond Laser-Fabrication of Apertures on Two-Dimensional Microlens Arrays
G. Langer, D. Brodoceanu, and D. Bäuerle: 2006

A high-reflective high-Q micromechanical Bragg-mirror
H.R. Boehm, S. Gigan, G. Langer , J. Hertzberg , F. Blaser , D. Bäuerle , K. Schwab , A. Zeilinger , M. Aspelmeyer: Appl. Phys. Lett. 2006

Self-cooling of a micro-mirror by radiation pressure
S. Gigan, H. R. Böhm, M. Paternostro, F. Blaser, G. Langer, J. Herzberg, D. Bäuerle, K. Schwab, A. Zeilinger, M. Aspelmeyer: Nature 2006

Photonic properties of silicon-coated monolayers of colloidal silica microspheres.
L. Landström, N. Arnold, D. Brodoceanu, K. Piglmayer, D. Bäuerle: Appl. Phys. A 83, 271-275 (2006)

Angle dependence of the Hall effect in HgBa2CaCu2O6 thin films.
H. Richter, I. Puica, W. Lang, M. Peruzzi, J.H. Durrell, H. Sturm, J.D. Pedarnig, D. Bäuerle: Phys Rev. B 73, 184506-1 bis 184506-5 (2006)

Laser-Microdissection of biological Tissues: Process Optimization.
D. Elvers, L. Remer, N. Arnold, D. Bäuerle: Appl. Phys. A 80, 55-59 (2005)

F2-laser patterning of GaPO4 resonators for humidity sensing.
J.D. Pedarnig, M. Peruzzi, H. Salhofer, R. Schwödiauer, W. Reichl, J. Runck: Appl. Phys. A 80, 1401-1404 (2005)

F2-laser ablation and micro-patterning of GaPO4.
M. Peruzzi, J.D. Pedarnig, H. Sturm, N. Huber, D. Bäuerle: Europhys. Lett. 65, 652-657 (2004)

Near-field optical nanopatterning of crystalline silicon.
G. Wysocki, J. Heitz, D. Bäuerle: Appl. Phys. Lett. 84, 2025-2027 (2004)

Single-step fabrication of silicon-cone arrays.
G. Wysocki, R. Denk, K. Piglmayer, N. Arnold, D. Bäuerle: Appl. Phys. Lett. 82, 692-693 (2003)

Giant dielectric permittivity and electromechanical strain in thin film materials produced by pulsed-laser deposition.
I. Vrejoiu, J.D. Pedarnig, D. Bäuerle, M. Dinescu: Appl. Phys. Lett. 83 , 2130-2132 (2003)