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Institute for Microelectronics and Microsensors
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Equipment.

Electronic-Lab

  • Frequency Counter HP53132A (225 MHz)
  • Precision-LCR-Meter HP4284A
  • LOCK-In Amplifier Model SR830 DSP
  • LOCK-In Amplifier Model SR844 RF
  • ENA Series Network Analyzer ES5061B 5Hz - 3GHz
  • Precision Impedance Analyzer  4294A 40Hz- 110MHz
  • 4-Quadrant Power Supply TCE 7621
  • 7 1/2 Digit Multimeter DMM7510
  • Pulse Function Arbitary Generator 81150A 120MHz
  • Oscilloscope Waverunner 44Xi 400MHz
  • Storage Oscilloscope Fluke PM3394A
  • Four Channel Color Digital Phosphor Oscilloscope TDS 3054
  • Stabinger Viscometer SVM 3000
  • Density and Sound Velocity Meter DSA 5000M
  • Climate Cabinet WKL 100
  • Climate Cabine LabEvent L C/64/70/3
  • 3D-Printer Objet 30 Pro
  • 3D-Printer Evotech EL102
  • FT-IR-Spectrometer INVENIO-R

Technology-Lab

  • Tempering Oven
  • Screen Printer
  • Polymer-Jet Microdrop autodrop compact 2
  • Spin-Coater
  • Wet Chemistry Benches
  • Ball Mill Pulverisette 6
  • Surface Profilometer DektakXT Bruker

 

High Frequency Measurement

  • LeCroy WAVEMASTER 8620A 6 GHz Oscilloscope Quad 20 GS/s
  • DCA Agilent 86100B Wide-Bandwidth Oscilloscope, incl. 2 Modules:
    • Agilent 54754A Differential TDR Module, 18 GHz
    • Agilent 86118A Remote Sampling Module, 70 GHz
  • Agilent 81134A 3.35 GHz Pulse/Pattern Generator
  • Picosecond Pulse Labs Pulsgenerator, Modell 4015C/-Fast Pulse Shaper, Modell 5208-218
  • Networkanalyser HP8510 50 GHz
  • Synthesizer Anritsu 3696A 65 GHz
  • Spectrumanalyser Tektronix 492 21 GHz, Mixer 26.5-40 GHz
  • Sweeper Wiltron 6640 (Ka-Band: 26.5 - 40 GHz)
  • Power-Meter Anritsu ML2437A (10 MHz - 40 GHz)
  • Power-Meter HP432A incl. Thermistorheads for Ka- and V-Band
  • Coaxial- and Waveguidecomponents for Ka- (26.5 - 40 GHz) and V-Band (50 - 75 GHz)