Go to JKU Homepage
Institute of Experimental Physics
What's that?

Institutes, schools, other departments, and programs create their own web content and menus.

To help you better navigate the site, see here where you are at the moment.

Ion Scattering Spectroscopy system "Minimobis" (ISS)  

Ion Scattering Spectroscopy system "Minimobis" (ISS)                                      

Photograph of the LEIS apparatus "Minimobis" for surface composition analysis of thin films and refractory metals


Figure 1

The UHV setup Minimobis (with a base pressure of 2x10−10 mbar) for low-energy ion scattering (LEIS) is devoted to the study of surface composition, structure and dynamics of solid surfaces. The ion beam (He+, Ne+, and Ar+ noble gas ions with an incident energy in the range from 0.8 keV to 5 keV) is oriented perpendicular to the surface, and the ions that are backscattered over an angle of 136° are detected by a series of micro-channel plates installed in a cylindrical mirror analyser (CMA). A common energy resolution is 1.5 - 2.0%.

A computer-controlled compact positioning mechanism is used to position a sample with an accuracy of 50 μm in the incident ion beam. The ion beam profile has a Gaussian shape with a FWHM of 0.4 mm. The sample holder is equipped with a compact heater capable to heat the sample up to 2500°C.

In addition to LEIS, Auger electron spectroscopy (AES) is used to look beyond the first atomic layer, and increase the information depth to a few monolayers. Structural information about the surface can be obtained by low-energy electron diffraction (LEED). Optionally, a reflectance difference spectroscopy (RDS) head can be mounted to one of the DN-40CF ports to study the adsorption of atoms or molecules on metal surfaces.


For more information please contact: Peter Bauer