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Center for Nanoscale Semiconductors.

The Center includes two optical structures used for microphotoluminescence spectroscopy and quantum optics as well as devices to measure the thermal conductivity of thin layers.

Atomic Layer Deposition System Savannah 100

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Electron-beam lithography system: Raith eLine plus

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III - V Molecular beam epitaxy system

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Cleanroom in the LIT Open Innovation Center

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