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Low-energy Rutherford backscattering system (LE-RBS)

Low-energy Rutherford backscattering system (LE-RBS)

Figure 1
Photograph of the low-energy Rutherford Backscattering chamber

The Rutherford Backscattering (RBS) system for quantitative composition analysis is connected to a Van-de-Graaff accelerator AN 700, which provides hydrogen and helium ions in the energy range 15 – 700 keV as projectiles. The relative energy spread of the ion beam is low (~ 2·10-4), the beam divergence is below 1°, and the beam spot at the sample is typically 1.5 mm. By use of these beam parameters, non-destructive analysis can be performed even on organic samples [1].

The RBS set-up is equipped with a high resolution detection system (depth resolution 5 – 10 nm) and a large solid angle detector system (high sensitivity) which permits to obtain non-destructively quantitative information on composition profiles for thin films and functional layers on any substrate including polymers. The high vacuum system is set up in such a way that analysis of any samples is possible without noticeable damage and virtually without any contamination of the samples. Up to five samples can be loaded routinely. In general, results can be provided within 48 hours from delivery of the samples.

For more information please contact: Peter Bauer or Daniel Primetzhofer


  1. M. Draxler, S. Zoister, F. Kastner, M. Bergsmann, P. Bauer
    Characterization of ultrathin Cr layers on PET by RBS and XRF
    Surf. Interface Anal. 34 (2002) 763