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Institute of Semiconductor and Solid State Physics
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X-Ray Equipment

1.) PANalytical X'Pert PRO Materials Research Diffractometer

The PANalytical X'Pert PRO Materials Research Diffractometer is suitable for coplanar as well as non-coplanar (in-plane) diffraction geometries. Easily applicable optics in modular form (PreFIX) allow for high resolution measurements. Fast reciprocal space mapping can be done with a 1D detector. With in-plane diffraction, it becomes possible to measure diffraction from lattice planes that are perpendicular to the sample surface. The sample holder can hold wafers up to 300 mm diameter.

Contact Person: Julian Stangl

Contact Person: A.Univ.Prof. Dr. Julian Stangl

Optics & Detectors:

Primary Beam

  • Mirror: W/Si, graded, parabolic, acceptance angle: 0.8°, length: 60 mm.
  • Monochromator + Crossed Slits Collimator: 4xGe[220], asymmetric, flat.
  • Hybrid Monochromator + Automatic Absorber: Divergence slit: 0.5°, height: 0.76 mm, dist. to sample: 320 mm. Mirror: W/Si, graded, parabolic, acceptance angle: 0.8°, length: 60 mm. Monochromator: Ge[220], 2-bounce, asymmetric, flat.

Secondary Beam

  • Triple Axis\Rocking curve attachment: Asymmetric triple axis Ge[220], 3-bounce, asymmetric, flat.
  • Diffracted Beam Mirror: W/Si, graded, parabolic, acceptance angle: 0.8°, length: 60 mm.
  • Parallel plate collimator
  • Programmable receiving slit
  • Xe proportional point detector
  • PIXcel 1D detector

2.) Rotating Anode

Contact Person: Julian Stangl

A versatile X-ray diffraction instrument with copper rotating anode powered by a 18kW Generator from Bruker AXS (M18XCE) is attached to a custom built 6-circle goniometer from Huber. Several optical elements, which can be combined in various ways allow the setup to be used in medium to high resolution configurations. The whole goniometer is motorized with stepper motors which are controlled by a custom built programmable logic controller rack built by the Forschungszentrum Rossendorf. The measurements are computer controlled by spec, which runs on a Ubuntu Linux PC. The 6-circle Goniometer enables measurements in various diffraction geometries:

  • coplanar X-ray diffraction
  • non-coplanar X-ray diffraction
  • grazing incidence diffraction
  • X-ray reflectivity
  • grazing incidence small angle X-ray scattering
Optics & Detectors:

Primary beam:

  • X-ray mirror: Xenocs double bent parabolic multilayer mirror (FOX 2D) for beam collimation
  • Monochromators: Two Ge (220) two-bounce channel cut monochromators, which can be used alone or in a Bartels monochromator configuration


Secondary Beam:

  • Analyzer (optional): a motorized analyzer stage for use on the detector arm is in development.
  • Vantec-1 PSD: Linear detector with ~50µm channel width from Bruker AXS
  • Braun PSD: gas flushed linear detector

Both linear detectors have fixed slit systems attached and can also be used as point detectors.

Sample Holders:

  • Huber goniometer head: modified version of the Huber 1003 manual goniometer head with two perpendicular cradles with common center of rotation
  • Evacuated sample environment with heater: An evacuated sample environment with heating possibility from room temperature up to 200°C (expandable if necessary). A Kapton window with >180° opening angle in the scattering plane allows the primary and scattered beam to enter the sample environment.
  • Motorized piezo stage: For accurate sample positioning an Piezo-driven goniometer head from attocube, with two cradles and two linear translation stages. The sample is mounted in the common center of rotation of the cradles which can be adjusted to the center of rotation of the 6-circle goniometer. The sample can be positioned with µm-precision. (in development)

3.) Seifert XRD 3003

Contact Person: Julian Stangl

The Seifert 3003 X-ray diffractometer allows for high resolution X-ray diffraction in coplanar geometry with several primary and secondary beam optics configurations. This means high resolution fast reciprocal space mapping with a 1D detector as well as high resolution rocking curve measurements and reciprocal space mapping with an analyzer crystal or secondary multilayer mirror.


Optics & detectors:

Primary beam

  • Mirror: graded, parabolic, bent.
  • Monochromator: 2 Ge[110] channel cut crystals, symmetric, flat. Usable as just one channel cut, or in Bartels configuration in (220) or (440) setting.

Secondary beam

  • Multilayer Mirror.
  • Channel Cut Analyzer: Ge[110], symmetric. Can be used in (220) or (440) Bragg condition.
  • Slits and Soller Slit
  • Meteor 1D linear pixel detector, can be used alone or in point detector mode behind the different secondary optics