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Institute of Semiconductor and Solid State Physics
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Fabrication Facilities for Advanced Solid-State Quantum Devices (FAQ)

This FFG investment project will expand the capabilities of the cleanroom facilities, at the University of Innsbruck (UIBK) and the Johannes Kepler University Linz (JKU) to improve the properties of advanced quantum devices built out of superconducting and photonic quantum circuits as well as semiconductor-based quantum emitters. These devices are widely used in quantum communication and quantum computation applications based on solid-state platforms and are complementary to other platforms for quantum science and technology successfully explored in Austria. 

The expansion of the micro and nano-fabrication facilities will allow the two universities and their research teams to build more advanced and better performing devices as well as to develop IP relevant to advancing quantum technologies in Austria and Europe. The two facilities are set up in a way that there is complementarity in the existing machines to ensure a wide range of accessible processes in Austria and the capability to ensure that in case of major equipment failure and long repair times the respective other institution can provide support. This project will enable us to expand the capabilities of optical and electron beam lithography, improve the quality of deposited materials and subsequent surface treatment, as well as improve the analysis of the surface quality of the fabricated devices.

FAQ project, design

PI at JKU: Prof. Dr. Armando Rastelli
Project Coordinator and PI at University of Innsbruck, Institute of Experimental Physics: Prof. Dr. Gregor Weihs
Project duration: 01.10.2022-31.03.2025